(Mobile book) Plasma Processing of Semiconductors (Nato Science Series E:)






 | #11163262 in Books |  Ingramcontent |  2012-10-12 |  2013-12-31 | Original language:English | PDF # 1 |  9.45 x1.42 x6.30l,1.91 | File Name: 9401064865 | 613 pages

 | Plasma Processing of Semiconductors Nato Science Series E

|

Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications.
Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as establ...


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