[Download] Polymers in Microlithography: Materials and Processes (ACS Symposium Series)






 | #3651136 in Books |  American Chemical Society |  1989-05-05 | Ingredients: Example Ingredients | Original language:English | PDF # 1 |  9.10 x1.10 x6.00l,1.60 | File Name: 0841217017 | 433 pages

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||About the Author|Elsa Reichmanis is at ATandT Bell Laboratories. Scott A. MacDonald is at Almaden Research Center.

This volume examines the role polymeric materials play in the electronics industry, with special emphasis on recent advances in the science and technology of resist materials and processing for microlithography. It provides the reader with an appreciation for the diversity of chemical research efforts that are required for the development of new resist materials and processes. Its 26 chapters are divided into three sections covering chemically applied resist chemistry, ...


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