(Free download) Handbook of VLSI Microlithography: Principles, Technology and Applications (Materials Science and Process Technology)
▲ From Brand: William Andrew ▲
| #4893289 in Books | William Andrew | 1991-01-15 | Original language:English | PDF # 1 | 9.02 x1.44 x5.98l,2.53 | File Name: 0815512813 | 671 pages |
This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings-- including optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry.
The book leads ...
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