(Free and download) Materials Science in Microelectronics I, Second Edition: The Relationships Between Thin Film Processing and Structure






 | #5736452 in Books |  2005-11-22 | Original language:English | PDF # 1 |  9.21 x.69 x6.14l,1.20 | File Name: 008044640X | 270 pages

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Thin films play a key role in the material science of microelectronics, and the subject matter of thin-films divides naturally into two headings: processing / structure relationship, and structure / properties relationship.

The first volume of Materials Science in Microelectronics focuses on the first relationship – that between processing and the structure of the thin-film. The state of the thin film’s surface during the period that one mono...


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