(Mobile pdf) Astonishing Legends Crucial Issues in Semiconductor Materials and Processing Technologies (Nato Science Series E:)






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Semiconductors lie at the heart of some of the most important industries and technologies of the twentieth century. The complexity of silicon integrated circuits is increasing considerably because of the continuous dimensional shrinkage to improve efficiency and functionality. This evolution in design rules poses real challenges for the materials scientists and processing engineers. Materials, defects and processing now have to be understood in their totality. Wo...


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