[Read free ebook] Lecture Notes on Principles of Plasma Processing
☆ Francis F. Chen, Jane P. Chang ☆
| #277305 in Books | Francis F Chen | 2003-01-31 | 2013-10-04 | Original language:English | PDF # 1 | 10.98 x.51 x8.27l,1.14 | File Name: 0306474972 | 208 pages | Lecture Notes on Principles of Plasma Processing
||4 of 4 people found the following review helpful.| Good for quick reading, Need Lieberman's book|By Kedar Hardikar|I found this to be a good book for quick reading. However, you need Lieberman and Lichtenberg (L &L) for a detailed treatment. L & L is of course not a very pleasant reading, so this provides a good break to "keep moving" through the material.
Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas. Unnecessarily detailed derivations are omi...
[PDF.uy92] Lecture Notes on Principles of Plasma Processing Rating: 3.91 (551 Votes)
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