[Mobile book] Handbook of Advanced Plasma Processing Techniques
• From Springer •
| #5525900 in Books | 2012-11-01 | Original language:English | PDF # 1 | 9.21 x1.35 x6.14l,2.04 | File Name: 3642630960 | 655 pages
||From the Back Cover|This volume covers the topic of advanced plasma processing techniques, from the fundamental physics of plasmas to diagnostics, modeling and applications such as etching and deposition for microelectronics. The use of plasmas for patterning o
Pattern transfer by dry etching and plasma-enhanced chemical vapor de position are two of the cornerstone techniques for modern integrated cir cuit fabrication. The success of these methods has also sparked interest in their application to other techniques, such as surface-micromachined sen sors, read/write heads for data storage and magnetic random access memory (MRAM). The extremely complex chemistry and physics of plasmas and their interactions with th...
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