(Read free) Sputtering Materials for VLSI and Thin Film Devices






 | #2392127 in Books |  2013-11-08 | Original language:English | PDF # 1 |  9.25 x7.50 x1.75l,.0 | File Name: 0815515936 | 608 pages

||About the Author|Engineering Consultant at Praxair Inc., Orangeburg, New York, USA

An important resource for students, engineers and researchers working in the area of thin film deposition using physical vapor deposition (e.g. sputtering) for semiconductor, liquid crystal displays, high density recording media and photovoltaic device (e.g. thin film solar cell) manufacturing. This book also reviews microelectronics industry topics such as history of inventions and technology trends, recent developments in sputtering technologies, manu...


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