(Free pdf) Silicon Devices and Process Integration: Deep Submicron and Nano-Scale Technologies
| #5187418 in Books | 2009-01-12 | Original language:English | PDF # 1 | 9.21 x1.31 x6.14l,2.30 | File Name: 0387367985 | 598 pages
||From the Back Cover||Silicon Devices and Process Integration is compiled from industrial and academic lecture notes and reflects years of experience in the development of silicon devices. It is prepared specifically for engineers and scientists in semi
Silicon Devices and Process Integration covers state-of-the-art silicon devices, their characteristics, and their interactions with process parameters. It serves as a comprehensive guide which addresses both the theoretical and practical aspects of modern silicon devices and the relationship between their electrical properties and processing conditions. The book is compiled from the author’s industrial and academic lecture notes and re...
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