[Free download] Introduction to VLSI Process Engineering






 | #7791290 in Books |  1993-06-30 | Original language:English | PDF # 1 |  9.21 x.56 x6.14l,1.10 | File Name: 0412395509 | 210 pages


|| |...an extremely good text... - Microelectronics Journal|Language Notes|Text: English (translation)| Original Language: Japanese

Integrated circuits are finding ever wider applications through a range of industries. Introduction to VLSI Process Engineering presents the design principles for devices, describes the overall VLSI process, and deals with the essential manufacturing technologies and inspection procedures.


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