(Ebook pdf) Handbook of Silicon Wafer Cleaning Technology, Second Edition (Materials Science and Process Technology)
♛ From William Andrew ♛
| #3437248 in Books | 2008-01-24 | Original language:English | PDF # 1 | 9.24 x1.66 x6.30l,2.51 | File Name: 0815515545 | 660 pages
||About the Author|Karen A. Reinhardt is Principle Consultant at Cameo Consulting in San Jose, California. At Cameo Consulting she assists companies investigating and assessing new and unique cleaning technologies that will allow realization of the ITRS roadmap w
The second Edition of the Handbook of Silicon Wafer Cleaning Technology is intended to provide knowledge of wet, plasma, and other surface conditioning techniques used to manufacture integrated circuits. The integration of the clean processes into the device manufacturing flow will be presented with respect to other manufacturing steps such as thermal, implant, etching, and photolithography processes. The Handbook discusses both wet and plasma-based cleaning tech...
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