[Ebook free] Handbook of 3D Integration, Volume 3: 3D Process Technology






 | #2535349 in Books |  2014-07-21 | Original language:English | PDF # 1 |  9.90 x1.10 x6.90l,.0 | File Name: 3527334661 | 474 pages

||From the Back Cover|Edited by key figures in 3D integration and written by top authors from high-tech companies and renowned research institutions, this book covers the intricate details of 3D process technology.| As such, the main focus is on silicon via forma

Edited by key figures in 3D integration and written by top authors from high-tech companies and renowned research institutions, this book covers the intricate details of 3D process technology. As such, the main focus is on silicon via formation, bonding and debonding, thinning, via reveal and backside processing, both from a technological and a materials science perspective. The last part of the book is concerned with assessing and enhancing the reliability of the 3D in...


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