(Download) Fundamental Electron Interactions with Plasma Processing Gases (Physics of Atoms and Molecules)
| #7165284 in Books | 2003-12-31 | Original language:English | PDF # 1 | 9.21 x1.69 x6.14l,3.68 | File Name: 0306480379 | 781 pages
||2 of 2 people found the following review helpful.| Phenomenal|By PParker|This is a marvelous book. I have never found a more perfect text for the topic of discussion. A wonderfully informative and surprisingly fun read.
This volume deals with the basic knowledge and understanding of fundamental interactions of low energy electrons with molecules. It pro vides an up-to-date and comprehensive account of the fundamental in teractions of low-energy electrons with molecules of current interest in modern technology, especially the semiconductor industry. The primary electron-molecule interaction processes of elastic and in elastic electron scattering, electron-impact ionizatio...
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