(Free) Leman Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies (Nato Science Series II:)






 | #7830977 in Books |  Kluwer Academic |  2002-04-30 | Original language:English | PDF # 1 |  9.21 x.86 x6.14l,1.33 | File Name: 1402005253 | 363 pages

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An up-to-date collection of tutorial papers on the latest advances in the deposition and growth of thin films for micro and nano technologies. The emphasis is on fundamental aspects, principles and applications of deposition techniques used for the fabrication of micro and nano devices. The deposition of thin films is described, emphasising the gas phase and surface chemistry and its effects on the growth rates and properties of films. Gas-phase phenomena, surface ch...


[PDF.pg63] Leman Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies (Nato Science Series II:)
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